Form 9.B Project Summary

Chron: 971613

Proposal Number: 23.01-0610A

Project Title: A Solar-Blind Silicon Carbide Ultraviolet Avalanche


Technical Abstract (Limit 200 words)

We propose to design and deliver a high performance avalanche photodiode (APD) for 0.15 to 0.35 Ám ultra-violet (UV) applications. The innovation is the use of high- temperature and radiation-tolerant, wide-bandgap silicon carbide (SiC) (4H and 6H) combined with a novel co-implantation approach which makes it possible to create p+-SiC guard rings. A unique feature of 6H and 4H-SiC is the very high k ratio (over 60) of hole/electron ionization coefficients which provides the possibility of fabricating very low noise APDs while maintaining high speed due to the high saturation velocity of both electrons and holes in SiC. In Phase I, we will demonstrate the feasibility of a p+/n-/n+ SiC APD using p-type guard rings created by C and Al co-implantation, determine the avalanche gain, and measure the k ratio for the CVD-grown 6H-SiC. We will also create a Monte Carlo model for ionization coefficient calculations and integrate it with the Sylvaco CAD tool to model the SiC APD for Phase II APD optimization. In Phase II, we would model the performance of 6H and 4H-SiC APDs and, based on Phase I results, fabricate and optimize a reliable planar SiC APD covering the spectral range of 0.15 to 0.35 Ám. Prof. Jian Zhao of Rutgers University will consult.

Potential Commercial Applications (Limit 200 words)

A high performance visible-blind UV photodetector capable of high temperature and high radiation tolerance for spectroscopic imaging, UV radiometry, flame sensing/fire control, and missile guidance systems. Currently, the only devices capable of addressing these applications are the bulky photocathodes that are difficult to integrate with control electronics and in general require high operating voltages.

Name and Address of Principal Investigator (Name,

Organization Name, Mail Address, City/State/Zip)

Dr. Marshall J. Cohen

Sensors Unlimited, Inc.

3490 U.S. Route 1, Building 12

Princeton , NJ 08540

Name and Address of Offeror (Firm Name, Mail Address,


Dr. Gregory H. Olsen

Sensors Unlimited, Inc.

3490 U.S. Route 1, Building 12

Princeton , NJ 08540