Project Title:

Atomic Oxygen Source for Superconducting Thin-Film Fabrication

04.10-1691
Atomic Oxygen Source for Superconducting Thin-Film Fabrication
Ionwerks
2215 Addison
Houston
TX
77030
J. Albert
Schultz
(713-667-1691)
JPL

Abstract:

The possibility of fabricating superconducting material using a low-energy, high-flux,
atomic oxygen source will be explored. The goal will be both to improve the epitaxial
growth of superconducting thin films on substrates and to remove the need for harsh
annealing in an oxygen environment.

Potential Commercial Application:  The commercial benefits of this work would be
a technique for the fabrication of superconductors on heat-sensitive substrates such
as gallium-arsenide