NASA SBIR 2005 Solicitation

FORM B - PROPOSAL SUMMARY


PROPOSAL NUMBER:05-II S4.04-8886
PHASE-I CONTRACT NUMBER: NNC06CB19C
SUBTOPIC TITLE:Optics and Optical Telescopes (including X-ray, UV, Visual, IR)
PROPOSAL TITLE:Nonintrusive Optical Thermometers for Real-Time Control of Fabrication Processes

SMALL BUSINESS CONCERN (Firm Name, Mail Address, City/State/Zip, Phone)
Los Gatos Research
67 East Evelyn Avenue, Suite 3
Mountain View, CA 94041-1529
(650) 965-7772

PRINCIPAL INVESTIGATOR/PROJECT MANAGER (Name, E-mail, Mail Address, City/State/Zip, Phone)
Douglas   Baer
d.baer@lgrinc.com
67 East Evelyn Avenue, Suite 3
Mountain View, CA  94041-1529
(650) 965-7772

TECHNICAL ABSTRACT (Limit 2000 characters, approximately 200 words)
In the proposed SBIR Phase I program LGR will develop and deploy a novel instrument ("Optical Thermometer") that provides real-time, in situ, non-contact measurements of substrate temperature in optical coating reactors. The instrument will employ an inexpensive diode laser, fiber optic components, and established laser interferometry methods to determine substrate temperature at multiple locations with a replicate precision of better than 0.01 degrees C in a measurement time of less than 0.01 seconds. The precision may be improved with increasing measurement time, if desired. The "Optical Thermometer" will be demonstrated on optical substrates made of a variety of materials in state-of-the-art industrial reactors specializing in UV, visible, near-IR and mid-IR optical coatings. The fast response of the sensor will enable coaters to use, for the first time, precise measurements of bulk substrate temperature to identify temperature nonuniformities during the coating process, refine and improve coating processes in real time, and minimize interwafer and batch-to-batch variations through closed-loop process control.

POTENTIAL NASA COMMERCIAL APPLICATIONS (Limit 1500 characters, approximately 150 words)
temperature sensors for optical coating reactors, temperature sensors for semiconductor process (etch) reactors, temperature sensors for monitoring thermal uniformity in large-scale and small-scale optics and telescopes

POTENTIAL NON-NASA COMMERCIAL APPLICATIONS (Limit 1500 characters, approximately 150 words)
process control of optical coating reactors, control of semiconductor process (etch) reactors, temperature sensors for monitoring thermal uniformity in large-scale and small-scale optics and telescopes, and industrial processes that require ultra-high accuracy temperature measurements and real-time control based on temperature

NASA's technology taxonomy has been developed by the SBIR-STTR program to disseminate awareness of proposed and awarded R/R&D in the agency. It is a listing of over 100 technologies, sorted into broad categories, of interest to NASA.

TECHNOLOGY TAXONOMY MAPPING
Optical


Form Printed on 07-25-06 17:04