NASA SBIR 2005 Solicitation

FORM B - PROPOSAL SUMMARY


PROPOSAL NUMBER:05 S4.04-8886
SUBTOPIC TITLE:Optics and Optical Telescopes (including X-ray, UV, Visual, IR)
PROPOSAL TITLE:Nonintrusive Optical Thermometers for Real-Time Control of Fabrication Processes

SMALL BUSINESS CONCERN (Firm Name, Mail Address, City/State/Zip, Phone)
Los Gatos Research
67 East Evelyn Avenue, Suite 3
Mountain View ,CA 94041 - 1518
(650) 965 - 7772

PRINCIPAL INVESTIGATOR/PROJECT MANAGER (Name, E-mail, Mail Address, City/State/Zip, Phone)
Douglas   Baer
d.baer@lgrinc.com
67 East Evelyn Avenue, Suite 3
Mountain View, CA  94041 -1518
(650) 965 - 7772

TECHNICAL ABSTRACT (LIMIT 200 WORDS)
The objective of the proposed SBIR Phase I program is to develop an instrument that provides real-time, in situ measurements of substrate temperature in optical coating reactors. The instrument will employ an inexpensive diode laser, fiber optic components, and established laser interferometry methods to determine substrate temperature at multiple locations with a replicate precision of better than 0.1 degrees C in a measurement time of less than 0.2 seconds. The precision may be improved with increasing measurement time, if desired. The instrument (an "optical thermometer") will be demonstrated on optical substrates made of a variety of materials in state-of-the-art industrial reactors specializing in UV, visible, near-IR and IR optical coatings. The fast response of the sensor will enable coaters to use, for the first time, precise measurements of bulk substrate temperature to identify temperature nonuniformities during the coating process, refine and improve coating processes in real time, and minimize batch-to-batch variations through closed-loop process control.

POTENTIAL NASA COMMERCIAL APPLICATIONS (LIMIT 150 WORDS)
NASA Commercial Applications include: temperature sensors for optical coating reactors, temperature sensors for semiconductor process (etch) reactors

POTENTIAL NON-NASA COMMERCIAL APPLICATIONS (LIMIT 150 WORDS)
Non-NASA Commercial Applications include: process control of optical coating reactors, control of semiconductor process (etch) reactors and other industrial processes

NASA's technology taxonomy has been developed by the SBIR-STTR program to disseminate awareness of proposed and awarded R/R&D in the agency. It is a listing of over 100 technologies, sorted into broad categories, of interest to NASA.

TECHNOLOGY TAXONOMY MAPPING
Optical
Optical & Photonic Materials


Form Printed on 09-19-05 13:12