6H-SiC Pressure Sensors for High
Temperature Applications
 

Kulite Semiconductor Products, Inc.
 
 

Leonia, NJ

A silicon carbide (SiC) pressure sensor for use at temperatures as high as 500°C, which is approximately 100°C higher than can be withstood by presently available silicon pressure sensors

• Prototype SiC pressure sensors were developed in Phase II contract
• The pressure sensors were shown to be capable of operating at 500°C for several hours
• Provided GRC with prototype SiC pressure sensors

• A high temperature pressure sensor for engine aircraft development and test.  Fast response pressure measurements in the compressor hot section for stall  detection and control
• This pressure sensor can be used for other high temperature turbine engine applications

• Phase III of $500K to provide GRC with 6-10 prototype SiC pressure sensors. Funding provided by Advanced High Temperature Engine Material Technology Program (HITEMP) and Higher Operating Temperature Propulsion Components (HOTPC) Program.
• A prototype SiC pressure sensor to be tested in the  compressor of a gas turbine engine by October 2000
• For use in military aircraft and any other turbine engine, e.g., tanks

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